Completed
Industrial
Solaris Semiconductor Fab — Ultra-Pure Water
Austin, TX2024
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Project Overview
Engineered an ultra-pure water system achieving 18 MΩ·cm resistivity for semiconductor manufacturing processes.
The Challenge
Semiconductor wafer fabrication demands the purest water on earth. Any trace ionic contamination causes defects and yield loss. The client required consistent 18.2 MΩ·cm UPW with sub-ppb TOC levels.
Our Solution
A 6-stage UPW train was designed: pre-treatment softening → reverse osmosis → electrodeionization (EDI) → UV oxidation → mixed-bed polishing → ultrafiltration. Real-time conductivity and TOC monitoring at 12 inline points.
Key Results
18.2 MΩ·cm resistivity achieved
TOC < 1 ppb
99.9999% particle removal at >0.05 μm
Zero production downtime due to water quality
Project Specs
Resistivity18.2 MΩ·cm
TOC< 1 ppb
Stages6-Stage Train
Monitoring12 Inline Points
Services Provided
UPW System DesignClean Room IntegrationCompliance Testing
Client
Solaris Industries
Austin, TX
